An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives
Yang, J. P.
Lau, Gih Keong
Tan, C. P.
He, Z. M.
Date of Issue2012
School of Mechanical and Aerospace Engineering
This paper presents an electro-thermal micro-actuator based on polymer composite for dual-stage head positioning systems in hard disk drives (HDDs). This micro-actuator has a pair of benders, which are made of silicon–polymer composite. When electro-thermally activated by resistive heating, the composite expands and consequently the benders produce a lateral bending motion to drive a femto slider, which carries a magnetic read/write head. The micro-actuator has been fabricated by deep silicon etching and polymer patterning. Experiment shows that the micro-actuator can drive up to 35 nm peak-to-peak displacement when it is activated by a 3.25 V half-sine input voltage at 500 Hz under a moderate temperature rise. The first in-plane mechanical resonant frequency is measured to occur at 36.8 kHz. Analytical and finite element models were developed to simulate the micro-actuator performance. It is noted that the simulation results agree well with the experimental measurement. With good performance, the electro-thermal micro-actuator are useful for high bandwidth dual-stage positioning systems in future high-density HDDs.
Sensors and actuators A : physical
© 2012 Elsevier B.V.