dc.contributor.authorYang, J. P.
dc.contributor.authorLau, Gih Keong
dc.contributor.authorTan, C. P.
dc.contributor.authorChong, Nyok-Boon
dc.contributor.authorThubthimthong, Borriboon
dc.contributor.authorHe, Z. M.
dc.date.accessioned2013-07-24T08:44:31Z
dc.date.available2013-07-24T08:44:31Z
dc.date.copyright2012en_US
dc.date.issued2012
dc.identifier.citationYang, J. P., Lau, G. K., Tan, C. P., Chong, N.-B., Thubthimthong, B., & He, Z. M. (2012). An electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drives. Sensors and Actuators A: Physical, 187, 98-104.en_US
dc.identifier.issn0924-4247en_US
dc.identifier.urihttp://hdl.handle.net/10220/12127
dc.description.abstractThis paper presents an electro-thermal micro-actuator based on polymer composite for dual-stage head positioning systems in hard disk drives (HDDs). This micro-actuator has a pair of benders, which are made of silicon–polymer composite. When electro-thermally activated by resistive heating, the composite expands and consequently the benders produce a lateral bending motion to drive a femto slider, which carries a magnetic read/write head. The micro-actuator has been fabricated by deep silicon etching and polymer patterning. Experiment shows that the micro-actuator can drive up to 35 nm peak-to-peak displacement when it is activated by a 3.25 V half-sine input voltage at 500 Hz under a moderate temperature rise. The first in-plane mechanical resonant frequency is measured to occur at 36.8 kHz. Analytical and finite element models were developed to simulate the micro-actuator performance. It is noted that the simulation results agree well with the experimental measurement. With good performance, the electro-thermal micro-actuator are useful for high bandwidth dual-stage positioning systems in future high-density HDDs.en_US
dc.language.isoenen_US
dc.relation.ispartofseriesSensors and actuators A : physicalen_US
dc.rights© 2012 Elsevier B.V.en_US
dc.subjectDRNTU::Engineering::Mechanical engineering
dc.titleAn electro-thermal micro-actuator based on polymer composite for application to dual-stage positioning systems of hard disk drivesen_US
dc.typeJournal Article
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.identifier.doihttp://dx.doi.org/10.1016/j.sna.2012.08.009


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