The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications
Tobing, Landobasa Yosef Mario A. L.
Zhang, Dao Hua
Date of Issue2012
Photonics Global Conference (2012 : Singapore)
School of Electrical and Electronic Engineering
We present a systematic study of different sonicated cold development scenarios for the purpose of achieving high density optical metamaterial. High aspect ratio sub-15-nm dots at pitch as small as 40 nm are successfully demonstrated for 110-nm thick resist at low exposure dose. Some of the key results include sub-15-nm gold nanodots at 40-nm pitch and high density optical metamaterial (with only ~30nm separation between two adjacent resonators).
© 2012 IEEE.