dc.contributor.authorTobing, Landobasa Yosef Mario A. L.
dc.contributor.authorTjahjana, Liliana
dc.contributor.authorZhang, Dao Hua
dc.date.accessioned2013-07-25T04:09:09Z
dc.date.available2013-07-25T04:09:09Z
dc.date.copyright2012en_US
dc.date.issued2012
dc.identifier.citationTobing, L. Y. M. A. L., Tjahjana, L., & Zhang, D. H. (2012). The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications. 2012 Photonics Global Conference (PGC).en_US
dc.identifier.urihttp://hdl.handle.net/10220/12195
dc.description.abstractWe present a systematic study of different sonicated cold development scenarios for the purpose of achieving high density optical metamaterial. High aspect ratio sub-15-nm dots at pitch as small as 40 nm are successfully demonstrated for 110-nm thick resist at low exposure dose. Some of the key results include sub-15-nm gold nanodots at 40-nm pitch and high density optical metamaterial (with only ~30nm separation between two adjacent resonators).en_US
dc.language.isoenen_US
dc.rights© 2012 IEEE.en_US
dc.titleThe role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applicationsen_US
dc.typeConference Paper
dc.contributor.conferencePhotonics Global Conference (2012 : Singapore)en_US
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.identifier.doihttp://dx.doi.org/10.1109/PGC.2012.6458017


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record