Multifunctional cantilever-free scanning probe arrays coated with multilayer graphene
Brown, Keith A.
Mirkin, Chad A.
Date of Issue2012
School of Materials Science and Engineering
Scanning probe instruments have expanded beyond their traditional role as imaging or “reading” tools and are now routinely used for “writing.” Although a variety of scanning probe lithography techniques are available, each one imposes different requirements on the types of probes that must be used. Additionally, throughput is a major concern for serial writing techniques, so for a scanning probe lithography technique to become widely applied, there needs to be a reasonable path toward a scalable architecture. Here, we use a multilayer graphene coating method to create multifunctional massively parallel probe arrays that have wear-resistant tips of uncompromised sharpness and high electrical and thermal conductivities. The optical transparency and mechanical flexibility of graphene allow this procedure to be used for coating exceptionally large, cantilever-free arrays that can pattern with electrochemical desorption and thermal, in addition to conventional, dip-pen nanolithography.
Proceedings of the national academy of sciences
© 2012 National Academy of Sciences. This paper was published in Proceedings of the national academy of sciences and is made available as an electronic reprint (preprint) with permission of National Academy of Sciences. The paper can be found at the following official DOI: [http://dx.doi.org/10.1073/pnas.1216183109]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.