A nano-actuator via cavity-enhanced optical dipole force
Tao, J. F.
Zhang, Q. X.
Tsai, J. M.
Kwong, Dim Lee.
Liu, A. Q.
Date of Issue2012
IEEE International Conference on Micro Electro Mechanical Systems (25th : 2012 : Paris, France)
School of Electrical and Electronic Engineering
In this paper, we demonstrate a nano-actuator using a silicon-based monolithic cavity nano-opto-mechanical system. The nano-actuator is constructed by a special designed nano-scale silicon suspended cantilever which is efficiently driven by the optical gradient force. In experiment, the actuator obtains a tuning range up to 52 nm. The optical power consumption is reduced to 0.04 mW/nm, which is much smaller than typical value of 3mW/nm in optomechanical systems.
DRNTU::Engineering::Electrical and electronic engineering
© 2012 IEEE.