Improvement of least squares integration method with iterative compensation for shape reconstruction from gradient
Asundi, Anand Krishna
Date of Issue2012
Optical Micro- and Nanometrology (4th : 2012 : Brussels, Belgium)
School of Mechanical and Aerospace Engineering
An improvement is made to the traditional 2D integration with least squares method by introducing an iterative compensation procedure. The issue of inaccurate reconstruction due to imperfection of Southwell grid model is solved through the introduced iterative compensations. The feasibility and superiority of the proposed method are investigated with simulations. Moreover, the proposed method is compared with the integration method with radial basis functions.
© 2012 SPIE. This paper was published in Proceedings of SPIE - Optical Micro- and Nanometrology IV and is made available as an electronic reprint (preprint) with permission of SPIE. The paper can be found at the following official DOI: [http://dx.doi.org/10.1117/12.921402]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.