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|Title:||Fabrication and plasma resistance properties of transparent YAG ceramics||Authors:||Qin, Xianpeng
Wong, Jen It
|Issue Date:||2011||Source:||Qin, X., Zhou, G., Yang, H., Wong, J. I., Zhang, J., Luo, D., Wang, S., Ma, J.,& Tang, D. (2012). Fabrication and plasma resistance properties of transparent YAG ceramics. Ceramics International, 38(3), 2529-2535.||Series/Report no.:||Ceramics International||Abstract:||High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6 h, the eroded depth of YAG ceramics was about 100 nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz.||URI:||https://hdl.handle.net/10356/99521
|ISSN:||0272-8842||DOI:||10.1016/j.ceramint.2011.11.023||Fulltext Permission:||none||Fulltext Availability:||No Fulltext|
|Appears in Collections:||EEE Journal Articles|
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