Si nanocrystal-based triple-layer anti-reflection coating for Si solar cells
Wong, Jen It
Date of Issue2013
School of Electrical and Electronic Engineering
A triple-layer anti-reflection coating (TL-ARC) with Si nanocrystals (nc-Si)-dielectric nanocomposite thin film structure is proposed for Si solar cells. The TL-ARC has a graded refractive index (RI) profile of high RI, medium RI, and low RI. Such RI profile is achieved with the structure consisting of a Si3N4 layer embedded with high concentration of nc-Si and another Si3N4 layer embedded with low concentration of nc-Si and a SiO2 layer. The design of the TL-ARC is carried out with the calculation of the effective indices of the high-RI and medium-RI layers with the Maxwell-Garnett effective medium approximation model. Due to the photoluminescence properties of nc-Si embedded in Si3N4 matrix, the TL-ARC has the inherent capability of down-converting ultraviolet photons to low-energy photons that are useful to Si solar cells. The deposition of the TL-ARC on Si solar cell is fabricated with plasma enhanced chemical vapor deposition in a single process step. The performance enhancement of Si solar cells by the TL-ARC has been demonstrated by experiments.
DRNTU::Engineering::Electrical and electronic engineering
Journal of applied physics
© 2013 AIP Publishing LLC. This paper was published in Journal of Applied Physics and is made available as an electronic reprint (preprint) with permission of AIP Publishing LLC. The paper can be found at the following official DOI: [http://dx.doi.org/10.1063/1.4817821]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.