Sub-60 nm periodic grating feature patterning by immersion based 364 nm laser interference
Murukeshan, V. M.
Date of Issue2012
School of Mechanical and Aerospace Engineering
In this paper, we report a methodology to fabricate high resolution periodic grating features using high index prism based interferometer and i-line laser source. Features with sub-60 nm half pitch size were fabricated on i-line resist in an immersion medium using a prism of high index 1.939.
Journal of nanoscience and nanotechnology