A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator
Ng, Geok Ing
Tsai, J. M.
Randles, A. B.
Gu, Y. D.
Suo, Z. G.
Liu, Ai Qun
Date of Issue2013
School of Electrical and Electronic Engineering
In this Letter, an optical gradient force driven Nanoelectromechanical Systems (NEMS) actuator, which is controlled by the Q-factor attenuation of micro-ring resonator, is demonstrated. The actuator consists of a tunable actuation ring resonator, a sensing ring resonator, and a mechanical actuation arc. The actuation displacement can reach up to 14 nm with a measured resolution of 0.8 nm, when the Q-factor of the ring resonator is tuned from 15 × 103 to 6 × 103. The potential applications of the NEMS actuator include single molecule manipulation, nano-manipulation, and high sensitivity sensors.
Applied physics letters
© 2013 AIP Publishing LLC. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of AIP Publishing LLC. The paper can be found at the following official DOI: [http://dx.doi.org/10.1063/1.4827096]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.