Review of single image signal-to-noise ratio estimation for SEM image
Sim, K. S.
Nia, M. E.
Tso, C. P.
Date of Issue2013
National Physics Conference (2012)
School of Mechanical and Aerospace Engineering
Scanning electron microscope (SEM) image signal-to-noise ratio (SNR) depends on the beam current, the materials present in the specimen, and the specimen topography. It is desirable to quantify the SNR in SEM images, as it is a parameter, along with spatial resolution, that quantifies the image quality. SNR measurement usually requires at least two images, to avoid this requirement, a method of SNR estimation with only a single image is described here. The SNR could be quantified as the ratio of signal variance to noise variance. The autocorrelation of image at its peak (zero offset) is used to estimate the noise variance and the signal component in accordance to the corresponding original autocorrelation and mean of the image while assuming the signal and the noise are uncorrelated.
Mechanical and Aerospace Engineering
AIP conference proceedings
© 2013 AIP Publishing LLC. This paper was published in AIP Conference Proceedings and is made available as an electronic reprint (preprint) with permission of AIP Publishing LLC. The paper can be found at the following official DOI: [http://dx.doi.org/10.1063/1.4803626]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.