Numerical simulation of non-ablative laser texturing of silicon surface with a continuous wave fiber laser
Date of Issue2014
School of Mechanical and Aerospace Engineering
Silicon is highly transparent to the infrared wavelength, so fiber laser with wavelength of 1090 nm is not regarded as a suitable tool for the purpose of ablation based surface texturing. However, we demonstrate, through finite element thermal analyses of laser irradiated surface, non-ablative texturing of Si surface is possible if suitable laser power and dwell time are used to produce peak temperatures above 1250 K and below the Si melting point of 1690 K. Localized oxidation occurs in the temperature range and results in formation of regularly patterned bumps.
Journal of computational and theoretical nanoscience
© 2014 American Scientific Publishers.