Please use this identifier to cite or link to this item:
https://hdl.handle.net/10356/97539
Title: | Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS | Authors: | Tian, Yang Lee, Kokyan Wang, Hong |
Keywords: | DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio | Issue Date: | 2014 | Source: | Tian, Y., Lee, K., & Wang, H. (2014). Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS. Microwave and Optical Technology Letters, 56(6), 1462-1465. | Series/Report no.: | Microwave and optical technology letters | Abstract: | We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective permittivity (∼1.02) in the frequency range of 0.1–40 GHz. The fabrication process has a low thermal budget, and can be easily integrated with the advanced Cu back-end-of-line CMOS to fabricate low-loss and high quality factor microwave and millimeter wave passives for system-on-chip applications. | URI: | https://hdl.handle.net/10356/97539 http://hdl.handle.net/10220/19655 |
ISSN: | 0895-2477 | DOI: | 10.1002/mop.28326 | Schools: | School of Electrical and Electronic Engineering | Research Centres: | Temasek Laboratories | Rights: | © 2014 Wiley Periodicals, Inc. | Fulltext Permission: | none | Fulltext Availability: | No Fulltext |
Appears in Collections: | EEE Journal Articles TL Journal Articles |
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