Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS
Date of Issue2014
School of Electrical and Electronic Engineering
We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective permittivity (∼1.02) in the frequency range of 0.1–40 GHz. The fabrication process has a low thermal budget, and can be easily integrated with the advanced Cu back-end-of-line CMOS to fabricate low-loss and high quality factor microwave and millimeter wave passives for system-on-chip applications.
DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
Microwave and optical technology letters
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