White light interferometer with color CCD for 3D-surface profiling of microsystems
Upputuri, Paul Kumar
Nandigana, Krishna Mohan
Kothiyal, Mahendra Prasad
Date of Issue2015
International Conference on Experimental Mechanics 2014
School of Chemical and Biomedical Engineering
White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry. In this paper, we combine white light interferometer with a single-chip color CCD camera which makes the measurement faster, simpler, and cost-effective. The red-bluegreen (RGB) color interferogram stored in a computer is then decomposed into its individual components and corresponding phase maps for red, green, and blue components are calculated independently. The usefulness of the technique is demonstrated on reflective micro-scale-samples.
© 2015 SPIE. This is the author created version of a work that has been peer reviewed and accepted for publication by Proceeding SPIE, International Conference on Experimental Mechanics 2014, SPIE. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1117/12.2081117].