dc.contributor.authorUpputuri, Paul Kumar
dc.contributor.authorPramanik, Manojit
dc.contributor.authorNandigana, Krishna Mohan
dc.contributor.authorKothiyal, Mahendra Prasad
dc.identifier.citationUpputuri, P. K., Pramanik, M., Nandigana, K. M., & Kothiyal, M. P. (2015). White light interferometer with color CCD for 3D-surface profiling of microsystems. Proceeding SPIE, International Conference on Experimental Mechanics 2014, 9302.en_US
dc.description.abstractWhite light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D surface profiling of Microsystems. However, the WLI is rather slow, because the number of frames to be recorded and evaluated is large compared to the single wavelength phase shifting interferometry. In this paper, we combine white light interferometer with a single-chip color CCD camera which makes the measurement faster, simpler, and cost-effective. The red-bluegreen (RGB) color interferogram stored in a computer is then decomposed into its individual components and corresponding phase maps for red, green, and blue components are calculated independently. The usefulness of the technique is demonstrated on reflective micro-scale-samples.en_US
dc.rights© 2015 SPIE. This is the author created version of a work that has been peer reviewed and accepted for publication by Proceeding SPIE, International Conference on Experimental Mechanics 2014, SPIE. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1117/12.2081117].en_US
dc.subjectDRNTU::Science::Chemistry::Physical chemistry
dc.titleWhite light interferometer with color CCD for 3D-surface profiling of microsystemsen_US
dc.typeConference Paper
dc.contributor.conferenceInternational Conference on Experimental Mechanics 2014en_US
dc.contributor.schoolSchool of Chemical and Biomedical Engineeringen_US
dc.description.versionAccepted versionen_US

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