Micromachined high-g accelerometers : a review
Date of Issue2015
School of Mechanical and Aerospace Engineering
This Topical Review reviews research and commercial development of high-g micromachined accelerometers. Emphasis is placed on different high-g sensing schemes and popular design templates used to achieve high-g sensing. Additionally, trends in high-g micromachined accelerometer development both in research and in the market are discussed.
Journal of micromechanics and microengineering
© 2015 IOP Publishing Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Journal of Micromechanics and Microengineering, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1088/0960-1317/25/3/033001].