Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/106024
Title: “Multipoint force feedback” leveling of massively parallel tip arrays in scanning probe lithography
Authors: Noh, Hanaul
Jung, Goo-Eun
Kim, Sukhyun
Yun, Seong-Hun
Jo, Ahjin
Kahng, Se-Jong
Cho, Nam-Joon
Cho, Sang-Joon
Keywords: Chemical and Biomedical Engineering
Materials Science and Engineering
Issue Date: 2015
Source: Noh, H., Jung, G.-E., Kim, S., Yun, S.-H., Jo, A., Kahng, S.-J., et al. (2015). “Multipoint force feedback” leveling of massively parallel tip arrays in scanning probe lithography. Small, 11(35), 4526–4531.
Series/Report no.: Small
Abstract: Nanoscale patterning with massively parallel 2D array tips is of significant interest in scanning probe lithography. A challenging task for tip-based large area nanolithography is maintaining parallel tip arrays at the same contact point with a sample substrate in order to pattern a uniform array. Here, polymer pen lithography is demonstrated with a novel leveling method to account for the magnitude and direction of the total applied force of tip arrays by a multipoint force sensing structure integrated into the tip holder. This high-precision approach results in a 0.001° slope of feature edge length variation over 1 cm wide tip arrays. The position sensitive leveling operates in a fully automated manner and is applicable to recently developed scanning probe lithography techniques of various kinds which can enable “desktop nanofabrication.”
URI: https://hdl.handle.net/10356/106024
http://hdl.handle.net/10220/26285
ISSN: 1613-6810
DOI: 10.1002/smll.201403736
Schools: School of Chemical and Biomedical Engineering 
School of Materials Science & Engineering 
Research Centres: Centre for Biomimetic Sensor Science 
Rights: © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:MSE Journal Articles
SCBE Journal Articles

SCOPUSTM   
Citations 20

11
Updated on Mar 21, 2024

Web of ScienceTM
Citations 20

11
Updated on Oct 21, 2023

Page view(s) 20

624
Updated on Mar 28, 2024

Google ScholarTM

Check

Altmetric


Plumx

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.