Multi-colour microscopic interferometry for optical metrology and imaging applications
Upputuri, Paul Kumar
Nandigana, Krishna Mohan
Kothiyal, Mahendra Prasad
Date of Issue2016
School of Chemical and Biomedical Engineering
Interferometry has been widely used for optical metrology and imaging applications because of their precision, reliability, and versatility. Although single-wavelength interferometery can provide high sensitivity and resolution, it has several drawbacks, namely, it fails to quantify large-discontinuities, large-deformations, and shape of unpolished surfaces. Multiple-wavelength techniques have been successfully used to overcome the drawbacks associated with single wavelength analysis. The use of colour CCD camera allows simultaneous acquisition of multiple interferograms. The advances in colour CCD cameras and image processing techniques have made the multi-colour interferometry a faster, simpler, and cost-effective tool for industrial applications. This article reviews the recent advances in multi-colour interferometric techniques and their demanding applications for characterization of micro-systems, non-destructive testing, and bio-imaging applications.
Optics and Lasers in Engineering
© 2016 Elsevier Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Optics and Lasers in Engineering, Elsevier. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1016/j.optlaseng.2016.03.020].