Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/84267
Title: Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators
Authors: Yuan, Yanhui
Wong, Yoke Rung
Xia, Xin
Du, Hejun
Keywords: ZnO
Thin-film sensor
Issue Date: 2014
Source: Xia, X., Du, H., Wong, Y. R., & Yuan, Y. (2014). Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators. Proceedings of the 1st International Conference on Progress in Additive Manufacturing (Pro-AM 2014), 358-363.
Abstract: To realize higher areal densities in hard disk drive (HDD), it is necessary to decrease distance between slider and disk, i.e. flying height. The low flying height may result in severe damage occurring on the head-disk interface. Therefore, it is essential to monitor head-disk interactions to prevent instability and damage. In this paper, a smart slider integrated with micro-sensor and micro-actuator is proposed. The fabrication and characterization of the smart slider with integrated zinc oxide (ZnO) thin-film sensor and actuator is presented here. A possible 3D printing manufacturing approach is also proposed to replace the current complex MEMS fabrication processes for producing the smart slider.
URI: https://hdl.handle.net/10356/84267
http://hdl.handle.net/10220/41689
DOI: 10.3850/978-981-09-0446-3_073
Rights: © 2014 by Research Publishing Services.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Conference Papers
Pro-AM Conference Papers

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