Electroosmotic flow in microchannel with black silicon nanostructures
Lim, An Eng
Lim, Chun Yee
Lam, Yee Cheong
Date of Issue2017
7th International Multidisciplinary Conference on Optofluidics 2017
School of Mechanical and Aerospace Engineering
Electroosmotic flow (EOF) is an electrokinetic phenomenon. The fluid motion originates from the electrical body force acting on the excess counterions in the electrical double layer (EDL) when an external electric field is applied across a microchannel. It can be employed in numerous microfluidic applications, ranging from pumping to chemical and biomedical analyses. Nanoscale networks/structures are often integrated within microchannels for a broad range of applications, such as sieving matrices for electrophoretic separation of biomolecules, and its introduction has been known to reduce EOF [1, 2]. Hitherto, the mechanics for EOF reduction due to nanostructured surfaces is still not well understood. To better elucidate the mechanics, we develop a novel fabrication method to produce microchannel with large-area nanostructures for investigation. The micro-/nanostructures produced demonstrate good regularity over a relatively large area and can be mass-produced cost-effectively. Despite the availability of various micro-/nanofabrication techniques, the existing techniques do not satisfy the aforementioned criteria.
Reactive ion etching
Reactive ion etching
© 2017 The Author(s) ( 7th International Multidisciplinary Conference on Optofluidics 2017). This is the author created version of a work that has been peer reviewed and accepted for publication by 7th International Multidisciplinary Conference on Optofluidics 2017, The Author(s) ( 7th International Multidisciplinary Conference on Optofluidics 2017). It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [https://sciforum.net/conference/optofluidics2017/paper/4158].