Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/86528
Title: Comparison between chemical vapor deposited and physical vapor deposited WSi2 metal gate for InGaAs n-metal-oxide-semiconductor field-effect transistors
Authors: Ong, B. S.
Pey, Kin Leong
Ong, C. Y.
Tan, Chuan Seng
Antoniadis, D. A.
Fitzgerald, E. A.
Keywords: Ozone
Chemical vapor deposition
Issue Date: 2011
Source: Ong, B. S., Pey, K. L., Ong, C. Y., Tan, C. S., Antoniadis, D. A., & Fitzgerald, E. A. (2011). Comparison between chemical vapor deposited and physical vapor deposited WSi2 metal gate for InGaAs n-metal-oxide-semiconductor field-effect transistors. Applied Physics Letters, 98(18), 182102-.
Series/Report no.: Applied Physics Letters
Abstract: We compare chemical vapor deposition (CVD) and physical vapor deposition (PVD) WSi2WSi2 metal gate process for In0.53Ga0.47AsIn0.53Ga0.47As n-metal-oxide-semiconductor field-effect transistors using 10 and 6.5 nm Al2O3Al2O3 as dielectric layer. The CVD-processed metal gate device with 6.5 nm Al2O3Al2O3 shows enhanced transistor performance such as drive current, maximum transconductance and maximum effective mobility. These values are relatively better than the PVD-processed counterpart device with improvement of 51.8%, 46.4%, and 47.8%, respectively. The improvement for the performance of the CVD-processed metal gate device is due to the fluorine passivation at the oxide/semiconductor interface and a nondestructive deposition process.
URI: https://hdl.handle.net/10356/86528
http://hdl.handle.net/10220/44100
ISSN: 0003-6951
DOI: http://dx.doi.org/10.1063/1.3584024
Rights: © 2011 American Institute of Physics (AIP). This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics (AIP). The published version is available at: [http://dx.doi.org/10.1063/1.3584024]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
Fulltext Permission: open
Fulltext Availability: With Fulltext
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