Efficient Approach to Cyclic Scheduling of Single-arm Cluster Tools with Chamber Cleaning Operations and Wafer Residency Time Constraint
Yang, Fa Jun
Wu, Nai Qi
Gao, Kai Zhou
Zhang, Chun Jiang
Zhu, Yu Ting
Date of Issue2018
School of Electrical and Electronic Engineering
In semiconductor manufacturing, with the shrinking down of wafer circuit widths, a strict quality control is required for wafer fabrication processes, resulting in that after a wafer being processed and removed from a chamber, a cleaning operation that takes significant time is performed for eliminating the chemical residual. Such a cleaning operation makes a traditional backward strategy for single-arm cluster tools inefficient. By the existing studies, it is shown that the productivity can be improved if some numbers of chambers at a step are kept empty. With this idea, an extended backward strategy is proposed by deciding the optimal number of empty chambers. Based on such a strategy, this work studies the challenging problem for scheduling a single-arm cluster tool with both chamber cleaning operations and wafer residency time constraint for the first time. By building a timed Petri net model for the system, two linear programs are proposed to determine the minimal cycle time and test the existence of a feasible schedule and find it if existing. At last, two industrial examples are used to demonstrate the obtained results.
IEEE Transactions on Semiconductor Manufacturing
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