dc.contributor.authorLee, Jeong Hoon
dc.contributor.authorKwak, Seungmin
dc.contributor.authorLee, Jin-Hyung
dc.contributor.authorKim, Inho
dc.contributor.authorYoo, Yong Kyoung
dc.contributor.authorLee, Tae Hoon
dc.contributor.authorShim, Young-Seok
dc.contributor.authorKim, Jinseok
dc.contributor.authorLee, Kyu Hyoung
dc.identifier.citationLee, J. H., Kwak, S., Lee, J.-H., Kim, I., Yoo, Y. K., Lee, T. H., et al. (2018). Sputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensor. Journal of Nanomaterials, 2018, 8678519-.en_US
dc.description.abstractWe report a sputtered PdO decorated TiO2 sensing layer by radiofrequency (RF) sputtering methods and demonstrated gas sensing performance for H2 gas. We prepared sputtered anatase TiO2 sensing films with 200 nm thickness and deposited a Pd layer on top of the TiO2 films with a thickness ranging from 3 nm to 13 nm. Using an in situ TiO2/Pd multilayer annealing process at 550°C for 1 hour, we observed that Pd turns into PdO by Auger electron spectroscopy (AES) depth profile and confirmed decorated PdO on TiO2 sensing layer from scanning electron microscope (SEM) and atomic-force microscope (AFM). We also observed a positive sensing signal for 3, 4.5, and 6.5 nm PdO decorated TiO2 sensor while we observed negative output signal for a 13.5 nm PdO decorated one. Using a microheater platform, we acquired fast response time as ~11 sec and sensitivity as 6 μV/ppm for 3 nm PdO under 33 mW power.en_US
dc.format.extent8 p.en_US
dc.relation.ispartofseriesJournal of Nanomaterialsen_US
dc.rights© 2018 Jeong Hoon Lee et al. Tis is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.en_US
dc.subjectHydrogen Gasen_US
dc.titleSputtered PdO decorated TiO2 sensing layer for a hydrogen gas sensoren_US
dc.typeJournal Article
dc.contributor.schoolSchool of Electrical and Electronic Engineeringen_US
dc.description.versionPublished versionen_US

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