Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/87205
Title: Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics
Authors: Cometto, Olivier
Sun, Bo
Tsang, Siu Hon
Huang, Xi
Koh, Yee Kan
Teo, Edwin Hang Tong
Keywords: Hexagonal Boron Nitride
Thin Film
Issue Date: 2015
Source: Cometto, O., Sun, B., Tsang, S. H., Huang, X., Koh, Y. K., & Teo, E. H. T. (2015). Vertically self-ordered orientation of nanocrystalline hexagonal boron nitride thin films for enhanced thermal characteristics. Nanoscale, 7(45), 18984-18991.
Series/Report no.: Nanoscale
Abstract: Vertically self-ordered hexagonal boron nitride (ordered h-BN) is a highly ordered turbostratic BN (t-BN) material similar to hexagonal BN, with its planar structure perpendicularly oriented to the substrate. The ordered h-BN thin films were grown using a High Power Impulse Magnetron Sputtering (HiPIMS) system with a lanthanum hexaboride (LaB6) target reactively sputtered in nitrogen gas. The best vertical alignment was obtained at room temperature, with a grounded bias and a HiPIMS peak power density of 60 W cm−2. Even though the film contains up to 7.5 at% lanthanum, it retains its highly insulative properties and it was observed that an increase in compressive stress is correlated to an increase in film ordering quality. Importantly, the thermal conductivity of vertically ordered h-BN is considerably high at 5.1 W m−1 K−1. The favourable thermal conductivity coupled with the dielectric properties of this novel material and the low temperature growth could outperform SiO2 in high power density electronic applications.
URI: https://hdl.handle.net/10356/87205
http://hdl.handle.net/10220/45268
ISSN: 2040-3364
DOI: http://dx.doi.org/10.1039/C5NR05009J
Rights: © 2015 The Royal Society of Chemistry.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:EEE Journal Articles

Google ScholarTM

Check

Altmetric

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.