On-chip antennas for 60-GHz radios in silicon technology
Zhang, Yue Ping
Guo, L. H.
Date of Issue2005
School of Electrical and Electronic Engineering
The recent advances in 60-GHz radios have called for the parallel development of compact and efficient millimeter-wave antennas. This brief addresses for the first time the design, fabrication, and characterization of on-chip inverted-F and quasi-Yagi antennas for 60-GHz radios. The design was made using the Zeland IE3D software package. The fabrication was realized with the back-end-of-line process of silicon substrates of low resistivity 10 Ω·cm. The characterization was conducted on wafer with Cascade Microtech coplanar probes and an HP8510XF network analyzer. The results show that the inverted-F antenna achieved a minimum return loss of 32 dB and a gain of -19 dBi at 61 GHz; while the quasi-Yagi antenna achieved a minimum return loss of 6.75 dB and a gain of -12.5 dBi at 65 GHz. Good agreement has been observed between the measured and simulated results.
DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio
IEEE transactions on electron devices
© 2006 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.