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|Title:||Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition||Authors:||Neville, Anne
Khun, Nay Win
Microwave-excited Plasma-enhanced CVD
|Issue Date:||2016||Source:||Khun, N. W., Neville, A., Kolev, I., & Zhao, H. (2016). Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition. Journal of Tribology, 138(3), 031301-. doi:10.1115/1.4031995||Series/Report no.:||Journal of Tribology||Abstract:||In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC films were deposited on the steel substrates with a tungsten carbide interlayer via μW-PECVD. The negative substrate bias used during the film deposition was varied. The Raman results revealed that the increased negative substrate bias increased the sp3 bonding in the DLC films as a result of the increased kinetic energy of film-forming ions during the film deposition. The tribological results clearly indicated that the friction and wear of the DLC-coated steel samples against a 100Cr6 steel ball significantly decreased with increased negative substrate bias due to the significantly improved wear resistance of the DLC films.||URI:||https://hdl.handle.net/10356/87844
|ISSN:||0742-4787||DOI:||10.1115/1.4031995||Rights:||© 2016 American Society of Mechanical Engineers (ASME).||Fulltext Permission:||none||Fulltext Availability:||No Fulltext|
|Appears in Collections:||MAE Journal Articles|
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