Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/87844
Title: Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition
Authors: Neville, Anne
Kolev, Ivan
Zhao, Hongyuan
Khun, Nay Win
Keywords: DRNTU::Engineering::Mechanical engineering
Microwave-excited Plasma-enhanced CVD
DLC Film
Issue Date: 2016
Source: Khun, N. W., Neville, A., Kolev, I., & Zhao, H. (2016). Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition. Journal of Tribology, 138(3), 031301-. doi:10.1115/1.4031995
Series/Report no.: Journal of Tribology
Abstract: In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC films were deposited on the steel substrates with a tungsten carbide interlayer via μW-PECVD. The negative substrate bias used during the film deposition was varied. The Raman results revealed that the increased negative substrate bias increased the sp3 bonding in the DLC films as a result of the increased kinetic energy of film-forming ions during the film deposition. The tribological results clearly indicated that the friction and wear of the DLC-coated steel samples against a 100Cr6 steel ball significantly decreased with increased negative substrate bias due to the significantly improved wear resistance of the DLC films.
URI: https://hdl.handle.net/10356/87844
http://hdl.handle.net/10220/46853
ISSN: 0742-4787
DOI: http://dx.doi.org/10.1115/1.4031995
Rights: © 2016 American Society of Mechanical Engineers (ASME).
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:MAE Journal Articles

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