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https://hdl.handle.net/10356/87844
Title: | Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition | Authors: | Neville, Anne Kolev, Ivan Zhao, Hongyuan Khun, Nay Win |
Keywords: | DRNTU::Engineering::Mechanical engineering Microwave-excited Plasma-enhanced CVD DLC Film |
Issue Date: | 2016 | Source: | Khun, N. W., Neville, A., Kolev, I., & Zhao, H. (2016). Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition. Journal of Tribology, 138(3), 031301-. doi:10.1115/1.4031995 | Series/Report no.: | Journal of Tribology | Abstract: | In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC films were deposited on the steel substrates with a tungsten carbide interlayer via μW-PECVD. The negative substrate bias used during the film deposition was varied. The Raman results revealed that the increased negative substrate bias increased the sp3 bonding in the DLC films as a result of the increased kinetic energy of film-forming ions during the film deposition. The tribological results clearly indicated that the friction and wear of the DLC-coated steel samples against a 100Cr6 steel ball significantly decreased with increased negative substrate bias due to the significantly improved wear resistance of the DLC films. | URI: | https://hdl.handle.net/10356/87844 http://hdl.handle.net/10220/46853 |
ISSN: | 0742-4787 | DOI: | 10.1115/1.4031995 | Schools: | School of Mechanical and Aerospace Engineering | Rights: | © 2016 American Society of Mechanical Engineers (ASME). | Fulltext Permission: | none | Fulltext Availability: | No Fulltext |
Appears in Collections: | MAE Journal Articles |
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