Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/89156
Title: Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses
Authors: Kim, Young-Jin
Choi, Minah
Lee, Keunwoo
Jang, Heesuk
Park, Jiyong
Kim, Seung-Woo
Keywords: DRNTU::Engineering::Mechanical engineering
Precision Measurement
Femtosecond Laser
Issue Date: 2015
Source: Kim, Y.-J., Choi, M., Lee, K., Jang, H., Park, J., & Kim, S.-W. (2015). Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses. Proceedings of SPIE - The International Conference on Photonics and Optical Engineering (icPOE 2014), 9449, 94493D-. doi:10.1117/12.2083260
Abstract: Fast, precise 3-D measurement of step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor, flat panel display and photovoltaic products. Optical interferometers have long been used, but not that wide-spread for step-structures due to their phase ambiguity or low spatial coherence. Femtosecond pulse lasers can provide novel possibilities to optical profilometry both in the time and the frequency domain. In the time domain, step-surfaces can be measured over wide area by exploiting low temporal but high spatial coherence of femtosecond pulses; in the frequency domain, multi-wavelength interferometry permits the absolute measurement over the discontinued surface profiles while maintaining the sub-wavelength measurement precision.
URI: https://hdl.handle.net/10356/89156
http://hdl.handle.net/10220/47015
DOI: 10.1117/12.2083260
Rights: © 2015 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE - The International Conference on Photonics and Optical Engineering (icPOE 2014) and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2083260]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Conference Papers

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