Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/89456
Title: Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength
Authors: Wen, Yongfu
Qu, Weijuan
Cheng, Haobo
Asundi, Anand
Keywords: DRNTU::Engineering::Mechanical engineering
Digital Holography Microscopy
Dual Wavelength
Issue Date: 2015
Source: Wen, Y., Qu, W., Cheng, H., & Asundi, A. (2015). Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength. Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015), 9524, 95242M-. doi:10.1117/12.2190197
Abstract: An improved compact digital holographic microscope (ICDHM) is developed for three-dimensional imaging of microstructures. This system is based on lensless magnification using a diverging wave. A point source generated by a long working distance microscope objective is located into the cube beam-splitter to get a higher numerical aperture (NA) of the system. The lateral resolution and the field-of-view of the system are confirmed with a calibration experiment. For the case of the optical path lengths (OPL) of object with step pattern larger than the wavelength, the traditional phase unwrapping algorithms cannot be unequivocally determinate, resulting in a 2π phase ambiguity. To solve this problem, dual wavelength phase unwrapping method was integrated into ICDHM, which extends the measuring capability of ICDHM over several microns of range. The experimental results demonstrate that the developed system is well suitable for the measurement of MEMS and Micro systems samples with high resolution.
URI: https://hdl.handle.net/10356/89456
http://hdl.handle.net/10220/47091
DOI: http://dx.doi.org/10.1117/12.2190197
Rights: © 2015 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2190197]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Conference Papers

Google ScholarTM

Check

Altmetric

Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.