Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/90205
Title: Scheduling and control of start-up process for time-constrained single-arm cluster tools with parallel chambers
Authors: Yang, FaJun
Qiao, Yan
Gao, KaiZhou
Wu, NaiQi
Zhu, YuTing
Simon, Ian Ware
Su, Rong
Keywords: Wafer Manufacturing
DRNTU::Engineering::Electrical and electronic engineering
Cluster Tools
Issue Date: 2018
Source: Yang, F., Qiao, Y., Gao, K., Wu, N., Zhu, Y., Simon, I. W., & Su, R. (2018). Scheduling and control of start-up process for time-constrained single-arm cluster tools with parallel chambers. IFAC-PapersOnLine, 51(7), 251-256. doi: 10.1016/j.ifacol.2018.06.309
Series/Report no.: IFAC-PapersOnLine
Abstract: In wafer manufacturing, with the shrinking down of wafer lot size, cluster tools are frequently required to switch from handling one lot of wafers to another, resulting in more transient processes, including start-up and close-down processes. In the existing work, optimal scheduling of start-up process for time-constrained single-arm cluster tools has been addressed under the assumption that each processing step consists of just one process chamber. This work relaxes this strict restriction by treating that multiple process chambers could be configured for processing steps. By building Petri net model for the start-up process, a linear program is derived to search a feasible schedule with minimal makespan for time-constrained single-arm cluster tools with parallel chambers for the first time. One industrial example is given to demonstrate the effectiveness of the obtained results.
URI: https://hdl.handle.net/10356/90205
http://hdl.handle.net/10220/47191
ISSN: 2405-8963
DOI: 10.1016/j.ifacol.2018.06.309
Rights: © IFAC 2018. This work is posted here by permission of IFAC for your personal use. Not for distribution. The original version was published in ifac-papersonline.net, DOI: 10.1016/j.ifacol.2018.06.309.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:EEE Journal Articles

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