Please use this identifier to cite or link to this item:
Title: Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter
Authors: Adhikari, Achyut
Dev, Kapil
Asundi, Anand
Keywords: DRNTU::Engineering::Mechanical engineering
Scanning Electron Microscopy (SEM)
Wire Grid Polarizers (WGP)
Issue Date: 2016
Source: Adhikari, A., Dev, K., & Asundi, A. (2016). Subwavelength metrology of Al wire grating employing finite difference time domain method and Mueller matrix polarimeter. Interferometry XVIII, 9960, 99600F-. doi:10.1117/12.2240639
Abstract: Wire grid polarizers (WGP), are sub-wavelength gratings with applications in display projection system due to their compact size, wide field of view and long-term stability. Measurement and testing of these structures are important to optimize their use. This is done by first measuring the Mueller Matrix of the WGP using a Mueller Matrix Polarimeter. Next the Finite Difference Time Domain (FDTD) method is used to simulate a similar Mueller matrix thus providing the period and step height of the WGP. This approach may lead to more generic determination of sub-wavelength structures including diffractive optical structures.
Rights: © 2016 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Interferometry XVIII and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: []. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:MAE Conference Papers

Google ScholarTM



Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.