dc.contributor.authorWang, Q.
dc.contributor.authorYuan, Guanghui
dc.contributor.authorKiang, K. S.
dc.contributor.authorSun, K.
dc.contributor.authorGholipour, B.
dc.contributor.authorRogers, E. T. F.
dc.contributor.authorHuang, K.
dc.contributor.authorAng, S. S.
dc.contributor.authorZheludev, Nikolay I.
dc.contributor.authorTeng, J. H.
dc.identifier.citationWang, Q., Yuan, G., Kiang, K. S., Sun, K., Gholipour, B., Rogers, E. T. F., ... Teng, J. H. (2017). Reconfigurable phase-change photomask for grayscale photolithography. Applied Physics Letters, 110(20), 201110-. doi:10.1063/1.4983198en_US
dc.description.abstractWe demonstrate a grayscale photolithography technique which uses a thin phase-change film as a photomask to locally control the exposure dose and allows three-dimensional (3D) sculpting photoresist for the manufacture of 3D structures. Unlike traditional photomasks, the transmission of the phase-change material photomask can be set to an arbitrary gray level with submicron lateral resolution, and the mask pattern can be optically reconfigured on demand, by inducing a refractive-index-changing phase-transition with femtosecond laser pulses. We show a spiral phase plate and a phase-type super-oscillatory lens fabricated on Si wafers to demonstrate the range of applications that can be addressed with this technique.en_US
dc.description.sponsorshipASTAR (Agency for Sci., Tech. and Research, S’pore)en_US
dc.description.sponsorshipMOE (Min. of Education, S’pore)en_US
dc.format.extent5 p.en_US
dc.relation.ispartofseriesApplied Physics Lettersen_US
dc.rights© 2017 American Institute of Physics. All rights reserved. This paper was published in Applied Physics Letters and is made available with permission of American Institute of Physics.en_US
dc.subjectFemtosecond Lasersen_US
dc.titleReconfigurable phase-change photomask for grayscale photolithographyen_US
dc.typeJournal Article
dc.contributor.schoolSchool of Physical and Mathematical Sciencesen_US
dc.description.versionPublished versionen_US
dc.contributor.organizationThe Photonics Instituteen_US
dc.contributor.organizationCentre for Disruptive Photonic Technologiesen_US

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