Please use this identifier to cite or link to this item: https://hdl.handle.net/10356/104900
Title: Multiple wavelength fringe analysis for surface profile measurements
Authors: Upputuri, Paul Kumar
Pramanik, Manojit
Keywords: Fringe Analysis
Engineering::Chemical engineering
Step-height
Issue Date: 2019
Source: Upputuri, P. K., & Pramanik, M. (2019). Multiple wavelength fringe analysis for surface profile measurements. Proceedings of SPIE - Quantitative Phase Imaging V. doi:10.1117/12.2508310
Abstract: Interferometry has been widely used for surface metrology because of their precision, reliability, and versatility. Although monochromatic-light interferometery can provide high sensitivity and resolution, but it fails to quantify largediscontinuities. Multiple-wavelength techniques have been successfully used to extend the unambiguous step height measurement rage of single wavelength interferometer. The use of RGB CCD camera allows simultaneous acquisition of fringes generated at different wavelengths. In this work, we discuss details about the fringe analysis of white light interferograms acquired using colour CCD camera. The colour image acquired using RGB camera is decomposed in to red, green, blue components and corresponding interference phase is measured using phase evaluation algorithms. The approach makes the 3D surface measurements faster, cost-effective for industrial applications.
URI: https://hdl.handle.net/10356/104900
http://hdl.handle.net/10220/49156
DOI: https://dx.doi.org/10.1117/12.2508310
Rights: © 2019 Society of Photo-optical Instrumentation Engineers (SPIE). All rights reserved. This paper was published in Proceedings of SPIE - Quantitative Phase Imaging V and is made available with permission of Society of Photo-optical Instrumentation Engineers (SPIE).
Fulltext Permission: open
Fulltext Availability: With Fulltext
Appears in Collections:SCBE Conference Papers

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