Metallization proximity studies for copper spiral inductors on silicon
Sia, Choon Beng
Yeo, Kiat Seng
Do, Manh Anh
Date of Issue2003
School of Electrical and Electronic Engineering
The impacts of metallization proximity for copper spiral inductors on silicon have been investigated in this paper. Performance of the spiral inductor versus area consumption tradeoff with respect to its core diameter is evaluated quantitatively for the first time. Effects of the inductor’s proximate grounded metallization on its overall inductive performance are also analyzed.
DRNTU::Engineering::Electrical and electronic engineering
IEEE transactions on semiconductor manufacturing
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