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      Computation of charge collection probability for any collecting junction shape

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      Computation of Charge Collection Probability for Any Collecting Junction Shape.pdf (670.1Kb)
      Author
      Kurniawan, Oka
      Ong, Vincent K. S.
      Tan, Chee Chin
      Li, Erping
      Date of Issue
      2009
      Conference Name
      IEEE International Symposium on Integrated Circuits (12th : 2009 : Singapore)
      School
      School of Electrical and Electronic Engineering
      Related Organization
      Institute of High Performance Computing A*STAR
      Version
      Published version
      Abstract
      Electron-beam-induced current (EBIC) of the scanning electron microscope (SEM) has been widely used for semiconductor devices and materials characterizations. The charge collection probability within a collecting junction plays an important role in determining the EBIC current. The conventional approach starts by solving the continuity equation to obtain the charge carrier density and then the analytical expression for the charge collection probability. Knowing the analytical expression of the charge collection probability enhances the study and development of the measurement technique. However, the conventional method usually requires lot of mathematical effort and the derived analytical expression is valid only for one particular junction shape. This paper presents a simple and straight forward computational method for the charge collection probability distribution within the charge collecting junction well by utilizing the reciprocity theorem and finite difference method with the junction shape serves as the boundary conditions. It not only simplifies the computation but also applicable to any junction shape as long as the drift-diffusion model remains valid. This method was verified using a U-shaped junction well.
      Subject
      DRNTU::Engineering::Electrical and electronic engineering::Electronic systems
      Type
      Conference Paper
      Rights
      © 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. http://www.ieee.org/portal/site This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.
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