Please use this identifier to cite or link to this item:
|Title:||Extraction of diffusion length using junction-less EBIC||Authors:||Ong, Vincent K. S.
Tan, Chee Chin.
|Keywords:||DRNTU::Engineering::Electrical and electronic engineering::Electronic systems::Signal processing||Issue Date:||2009||Source:||Ong, V. K. S., Tan, C. C., & Radhakrishnan, K. (2009). Extraction of diffusion length using junction-less EBIC. In proceedings of the 12th International Symposium on Integrated Circuits: Singapore, (pp.526-529).||Abstract:||The electron-beam-induced current (EBIC) mode of the scanning electron microscope (SEM) has been widely used in semiconductor materials and devices characterization in particular the extraction of minority carrier properties. The conventional approaches require the sample to have a built-in electric field created by the charge collecting junction that separates the majority carriers from the minority carriers and drives the induced current into the external circuitry for detection. As a result, these conventional approaches are not applicable for samples without junctions, i.e. bare substrates. This paper discusses the feasibility of extracting the minority carrier diffusion length in junction-less sample using the junction-less EBIC technique with the use of a two-point probe method. A 2-D device simulator is used to verify this technique and it is found the accuracy depends on the location of the origin.||URI:||https://hdl.handle.net/10356/92076
|Rights:||© 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE. This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder. http://www.ieee.org/portal/site This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. In most cases, these works may not be reposted without the explicit permission of the copyright holder.||Fulltext Permission:||open||Fulltext Availability:||With Fulltext|
|Appears in Collections:||EEE Conference Papers|
Files in This Item:
|Extraction of Diffusion Length Using Junction-less EBIC.pdf||1.39 MB||Adobe PDF|
Items in DR-NTU are protected by copyright, with all rights reserved, unless otherwise indicated.