Vibration measurement of a micro-structure by digital holographic microscopy
Tay, Cho Jui
Date of Issue2009
A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of the object at different instants are obtained by digital reconstruction. The displacement, velocity and acceleration are evaluated by both spatial and temporal Fourier and windowed Fourier analyses. The results show that digital holographic microscopy with Fourier analyses is an effective method for evaluating the dynamic characteristics of a MEMS component.
DRNTU::Science::Physics::Optics and light
Measurement science and technology
This is the author created version of a work that has been peer reviewed and accepted for publication by Measurement Science & Technology, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [DOI:http://dx.doi.org/10.1088/0957-0233/20/6/065301].