Thermo-mechanical characterization of surface-micromachined microheaters using in-line digital holography
Singh, Vijay Raj
Hegde, Gopalkrishna M.
Date of Issue2010
School of Mechanical and Aerospace Engineering
This paper describes the application of lensless in-line digital holographic microscopy (DHM) to carry out thermo-mechanical characterization of microheaters fabricated through PolyMUMPs three-layer polysilicon surface micromachining process and subjected to a high thermal load. The mechanical deformation of the microheaters on the electrothermal excitation due to thermal stress is analyzed. The numerically reconstructed holographic images of the microheaters clearly indicate the regions under high stress. A double-exposure method has been used to obtain the quantitative measurements of the deformations, from the phase analysis of the hologram fringes. The measured deformations correlate well with the theoretical values predicted by a thermo-mechanical analytical model. The results show that lensless in-line DHM with Fourier analysis is an effective method for evaluating the thermo-mechanical characteristics of MEMS components.
DRNTU::Science::Physics::Optics and light
Measurement science and technology
© 2010 IOP Publishing Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Measurement Science and Technology, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [DOI: http://dx.doi.org/10.1088/0957-0233/21/1/015301].