Digital holography for MEMS application
Singh, Vijay Raj
Date of Issue2009
Digital Holography and Three-Dimensional Imaging (2009 : Vancouver, Canada)
School of Mechanical and Aerospace Engineering
Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.
DRNTU::Science::Physics::Optics and light
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