dc.contributor.authorAnand, Asundi
dc.contributor.authorSingh, Vijay Raj
dc.identifier.citationAnand, A. & Singh, V. R. (2009). Digital Holography for MEMS Application. Digital Holography and Three-Dimensional Imaging (DH) (2009:Vancouver).en_US
dc.description.abstractStudies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.en_US
dc.format.extent3 p.en_US
dc.rights© 2009 Optical Society of America. This paper was published in OSA Technical Digest and is made available as an electronic reprint (preprint) with permission of Optical Society of America. The paper can be found at URL: http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.en_US
dc.subjectDRNTU::Science::Physics::Optics and light
dc.titleDigital holography for MEMS applicationen_US
dc.typeConference Paper
dc.contributor.conferenceDigital Holography and Three-Dimensional Imaging (2009 : Vancouver, Canada)en_US
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen_US
dc.description.versionPublished versionen_US

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