Compact handheld digital holographic microscopy system development
Singh, Vijay Raj
Date of Issue2009
International Conference on Experimental Mechanics (4th : 2009 : Singapore)
School of Mechanical and Aerospace Engineering
National Research Foundation Singapore
Development of a commercial prototype of reflection handheld digital holographic microscope system is presented in this paper. The concept is based on lensless magnification using diverging wave geometry and the miniaturized optical design which provides a compact packaged system. The optical geometry design provides the same curvature of object and reference waves and thus phase aberration is automatically compensated. The basic methodology of the system is developed and it further explored for 3D imaging, static deflection and vibration measurements applications. Based on the developed methodology an user-friendly software is developed suitable for industrial shop floor environment. The applications of the system are presented for 3D imaging, static deflection measurement and vibration analysis of MEMS samples. The developed system is well suitable for the testing of MEMS and Microsystems samples, with full-field and real-time features, for static and dynamic inspection and characterization and to monitor micro-fabrication process.
DRNTU::Science::Physics::Optics and light
© 2009 SPIE. This is the author created version of a work that has been peer reviewed and accepted for publication by International Conference on Experimental Mechanics, SPIE. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: http://dx.doi.org/10.1117/12.851421.