CMOS-compatible nanowire sensor arrays for detection of cellular bioelectricity
Pui, Tze Sian
Date of Issue2009
School of Chemical and Biomedical Engineering
Perfectly aligned arrays of long silicon nanowires fabricated using a top–down complementary metal oxide semiconductor (CMOS) compatible approach and their ability for real-time extracellular recording of cellular bioelectricity are presented. The technique enables noninvasive, high-sensitivity, high-throughput, long-term electrophysiology measurements at the single-cell level or from tissues.
DRNTU::Engineering::Chemical engineering::Biochemical engineering
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