Micro check valves for integration into polymeric microfluidic devices
Low, Cassandra Lee-Ngo
Date of Issue2004
School of Mechanical and Aerospace Engineering
In this paper we describe the design, simulation, fabrication and characterization of micro check valves suitable for integration into polymeric microfluidic devices such as micropumps or test cartridges for biomedical analysis. The valves are fabricated by a polymeric surface micromachining process, which utilizes SU-8 as the functional material. The devices are assembled with the lamination technique. A micro check valve consists of three layers: an inlet layer, a valve layer and an outlet layer. The valve is a disc with a diameter of 1 mm. The disc is suspended on folded beams, which act as valve springs. Both valve disc and springs are fabricated in a 100 µm SU-8 layer. The valves prove a clear flow rectification function. Relatively low pressure is required for opening the valve. The valves were tested and characterized with water. One of the valves is successfully integrated into a polymeric micropump. These valves prove the facile and reliable lamination technology for the fabrication of complex polymeric microfluidic devices for biomedical analysis.
Journal of micromechanics and microengineering
© 2004 IOP Publishing Ltd. This is the author created version of a work that has been peer reviewed and accepted for publication by Journal of Micromechanics and Microengineering, IOP Publishing Ltd. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org.ezlibproxy1.ntu.edu.sg/10.1088/0960-1317/14/1/309].