dc.contributor.authorKrishna, Dangeti Siva Rama
dc.contributor.authorSun, Yong
dc.contributor.authorChen, Zhong
dc.date.accessioned2012-05-29T07:40:21Z
dc.date.available2012-05-29T07:40:21Z
dc.date.copyright2011en_US
dc.date.issued2011
dc.identifier.citationKrishna, D. S. R., Sun, Y., Chen, Z. (2011). Magnetron Sputtered TiO2 Films on a Stainless Steel Substrate: Selective Rutile Phase Formation and Its Tribological and Anti-corrosion Performance. Thin Solid Films, 519(15), 4860–4864. .en_US
dc.identifier.urihttp://hdl.handle.net/10220/8172
dc.description.abstractIn this work, TiO2 films on 316L stainless steel have been formed by non-reactive magnetron sputtering of TiO2 target. The effect of a titanium underlayer on the crystalline phase of the TiO2 film has been investigated in terms of phase evolution, film morphology, corrosion resistance, adhesion strength, hardness and tribological characteristics. Results showed that the titanium underlayer has a significant effect on the phase of the TiO2 film. Without this underlayer, an anatase TiO2 film is produced, in consistence with many other investigations. However, it is found that with a titanium underlayer, a rutile TiO2 film can be directly formed on the substrate. The thickness of the interface layer affects the crystallinity of the rutile film. By controlling the underlayer thickness, the resultant rutile film crystal structure and morphology could be changed accordingly. At an optimized state, the rutile coating shows much improved adhesion, friction, wear and corrosion properties.en_US
dc.format.extent22 p.en_US
dc.language.isoenen_US
dc.relation.ispartofseriesThin solid filmsen_US
dc.rights© 2011 Elsevier. This is the author created version of a work that has been peer reviewed and accepted for publication by Thin Solid Films, Elsevier. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1016/j.tsf.2011.01.042].en_US
dc.subjectDRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
dc.titleMagnetron sputtered TiO2 films on a stainless steel substrate : selective rutile phase formation and its tribological and anti-corrosion performanceen_US
dc.typeJournal Article
dc.contributor.schoolSchool of Materials Science and Engineeringen_US
dc.identifier.doihttp://dx.doi.org/10.1016/j.tsf.2011.01.042
dc.description.versionAccepted versionen_US


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