Fabrication of sub-50-nm solid-state nanostructures on the basis of dip-pen nanolithography
Mirkin, Chad A.
Date of Issue2003
School of Materials Science and Engineering
The fabrication of arrays of sub-50-nm gold dots and line structures with deliberately designed 12−100-nm gaps is reported. These structures were made by initially using dip-pen nanolithography to pattern the etch resist, 16-mercaptohexadecanoic acid, on Au/Ti/SiOx/Si substrates and then using wet-chemical etching to remove the exposed gold.
© 2003 American Chemical Society.