Nano-opto-mechanical actuator driven by gradient optical force.
Xu, K. J.
Liu, A. Q.
Yu, M. B.
Kwong, Dim Lee.
Date of Issue2012
School of Electrical and Electronic Engineering
In this letter, a nanoscale opto-mechanical actuator driven by gradient optical force is designed and demonstrated. The nanoscale actuator can achieve a maximum displacement of 67 nm with a response time of 94.5 ns. The optical force is estimated as 1.01 pN/μm/mW in C-band operating wavelengths. The device is fabricated on silicon-on-insulator wafer using standard dry etching processes. Compared with traditional microelectromechanical systems actuators driven by electrostatic force, the nanoscale opto-mechanical actuator has the advantages of high resolution of actuation, nanoscale displacement, and fast operating speed. It has potential applications in optical signal processing, chemical, and biological sensing.
DRNTU::Engineering::Electrical and electronic engineering
Applied physics letters
© 2012 American Institute of Physics. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official DOI: [http://dx.doi.org/10.1063/1.3673854]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.