A nano-opto-mechanical pressure sensor via ring resonator.
Tsai, J. M.
Ji, X. M.
Bao, M. H.
Huang, Y. P.
Kwong, Dim Lee.
Liu, Ai Qun.
Date of Issue2012
School of Electrical and Electronic Engineering
This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which agrees with numerical prediction. Due to the strong variation of sensitivity with different ring radius and thickness of the diaphragm, the pressure sensor can be used to form an array structure to detect the pressure distribution in highly accurate measurement with low-cost advantages. The nano-opto-mechanical pressure sensor has potential applications such as shear stress displacement detection, pressure wave detector and pressure mapping etc.
DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
© 2012 Optical Society of America. This paper was published in Optics Express and is made available as an electronic reprint (preprint) with permission of 2012 Optical Society of America. The paper can be found at the following official DOI: [http://dx.doi.org/10.1364/OE.20.008535]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.