Compact piezoelectric micromotor with a single bulk lead zirconate titanate stator
Date of Issue2013
School of Mechanical and Aerospace Engineering
The advance of micro/nanotechnology promotes the development of micromotors in recent years. In this article, a compact piezoelectric ultrasonic micromotor with a single bulk lead zirconate titanate stator is proposed. A traveling wave is generated by superposition of bending modes with 90 phase difference excited by d15 inverse piezoelectric effects. The operating principle simplifies the system structure significantly, and provides a miniaturization solution. A research prototype with the size of 0.75x0.75x1.55mm is developed. It can produce start-up torque of 0.27uNmand maximum speed of 2760 r/min at 14RMS.
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Applied physics letters
© 2013 American Institute of Physics. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official DOI: http://dx.doi.org/10.1063/1.4799353. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law.