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dc.contributor.authorZhu, Shaolien
dc.contributor.authorZhou, Weien
dc.contributor.authorSong, Yunfengen
dc.identifier.citationZhu, S., Zhou, W., & Song, Y. (2012). Non-Contact Measurement for 3D Profile of Hybrid Metal Thin Film by White-Light Interference System. Advanced Science Letters, 18, 36-42.en
dc.description.abstractWe presented a novel optical non-contact measurement system for detection of the thickness and 3D profile of a hybrid film. The optical interference system and the corresponding compiled data processing program for realizing the non-contact detection of thickness and 3D profile of the hybrid metal film were designed. White light source was used to generate the optical interference of the hybrid Au-Ag metallic film. The characteristics of the film were analyzed through the interference fringe. The original color fringe is obtained from a CCD camera, and the Red-Green-Blue (RGB) raw fringe image is put into our compiled numerical program. The fringe phase was wrapped using Fourier transform technique. The unwrapped phase was reconstructed to be the whole-filed Z image and 3D profile by use of a bilateral filter.en
dc.relation.ispartofseriesAdvanced science lettersen
dc.rights© 2012 American Scientific Publishers.en
dc.titleNon-contact measurement for 3D profile of hybrid metal thin film by white-light interference systemen
dc.typeJournal Articleen
dc.contributor.schoolSchool of Mechanical and Aerospace Engineeringen
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