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Title: Non-contact measurement for 3D profile of hybrid metal thin film by white-light interference system
Authors: Zhu, Shaoli
Zhou, Wei
Song, Yunfeng
Issue Date: 2012
Source: Zhu, S., Zhou, W., & Song, Y. (2012). Non-Contact Measurement for 3D Profile of Hybrid Metal Thin Film by White-Light Interference System. Advanced Science Letters, 18, 36-42.
Series/Report no.: Advanced science letters
Abstract: We presented a novel optical non-contact measurement system for detection of the thickness and 3D profile of a hybrid film. The optical interference system and the corresponding compiled data processing program for realizing the non-contact detection of thickness and 3D profile of the hybrid metal film were designed. White light source was used to generate the optical interference of the hybrid Au-Ag metallic film. The characteristics of the film were analyzed through the interference fringe. The original color fringe is obtained from a CCD camera, and the Red-Green-Blue (RGB) raw fringe image is put into our compiled numerical program. The fringe phase was wrapped using Fourier transform technique. The unwrapped phase was reconstructed to be the whole-filed Z image and 3D profile by use of a bilateral filter.
DOI: 10.1166/asl.2012.4250
Rights: © 2012 American Scientific Publishers.
Fulltext Permission: none
Fulltext Availability: No Fulltext
Appears in Collections:MAE Journal Articles

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